Opto-electronic integrated circuit

ABSTRACT

Present invention is to provide a process for producing an opto-electronic integrated circuit comprising a field effect transistor as an electronic device and a photo-diode as an optical device both formed on an InP substrate, 
     the field effect transistor comprising a high electron mobility transistor having: 
     a GaInAs layer epitaxially grown in the InP substrate in a preset region thereof, a n-AlInAs layer epitaxially grown on the GaInAs layer, a gate electrode formed on the AlInAs layer, and a source electrode and a drain electrode formed on the AlInAs layer with the gate electrode therebetween, and 
     the photo-diode comprising a PIN photo-diode having: 
     the GaInAs layer epitaxially grown on the InP substrate near the region of the field effect transistor simultaneously with the growth of that of the field effect transistor, the n-AlInAs layer epitaxially grown on the GaInAs layer simultaneously with the growth of that of the field effect transistor, a n-InP layer epitaxially grown on the n-AlInAs layer, an undoped GaInAs layer epitaxially grown on the n-InP layer in a preset region thereof, a p-GaInAs layer epitaxially grown on the undoped GaInAs layer, an anode electrode formed on the p-GaInAs layer, and a cathode electrode formed on the n-InP layer near the undoped GaInAs layer.

This is a division of application Ser. No. 07/313/507 filed Feb. 22,1989, now U.S. Pat. No. 4,996,163.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Present invention relates to an opto-electronic integrated circuit(OEIC) having a semiconductor optical device and electronic deviceintegrated monolithically on one substrate.

2. Related Background Art

Following methods are known as a method for producing theopto-electronic integrated circuit.

First method as described in Presentation No. S9-1, 1987 NationalConference of Semiconductor Materials Section, Association of ElectronicInformation Communication, is composed of steps of; forming aphoto-diode (PD) as an optical device on an indium phosphide (InP)substrate by the vapor phase epitaxy (VPE), forming a gallium arsenide(GaAs) layer next to the PD on the InP substrate, and forming a fieldeffect transistor (FET) thereon as an electronic device.

Second method, as described in Presentation No. S9-3, 1987 NationalConference of Semiconductor Materials Section, Association of ElectronicInformation Communication, is composed steps of; forming a recess on anInP substrate, forming a PD by the VPE in the recess, removing the layerfor the PD in a FET region, forming an eiptaxial layer for the FET, andforming the FET on the epitaxial layer;

And third method, as described in Presentation No. S9-2, 1987 NationalConference of Semiconductor Materials Section, Association of ElectronicInformation Communication is composed of steps of; forming a n-GaInAslayer for a junction type field effect transistor (J-FET) and anepitaxial layer for a PD respectively on an InP substrate, andperforming beryllium (Be) ion implantation to form a p-region so as toform the PD and the J-FET.

But, in the first and the second methods, it is necessary to grown anepitaxial layer for a PD and remove the unnecessary portion thereof togrow anew an epitaxial layer for a FET. The production steps areaccordingly complicated. This results in the problems that it isdifficult to make highly pure crystals in growing anew the epitaxiallayer, with a result that a FET having good characteristics cannot bereproduced with ease.

The third method requires a Be ion implantation step and an annealingstep. This results in the problem that the method is accordinglycomplicated. Another problem is that wavers is bent in the annealingstep, and the lithography in a following step results in low precision.Further another problem is that the method for the third circuit has touse as a FET a J-FET, whose high frequency characteristics are not good.

SUMMARY OF THE INVENTION

A first object of present invention is to provide a method for producingan opto-electronic integrated circuit which enables a plurality ofepitaxial layers respectively necessary for an optical device and anelectronic device to be formed simultaneously and which includesaccordingly simplified processing steps.

A second object of present invention is to provide a method forproducing an opto-electronic integrated circuit which excludes a step ofion implantation and accordingly does not require an annealing stepwhich has been a cause for low precision of the lithography.

A third object of present invention is to provide a method for producingan opto-electric integrated circuit having a field effect transistor asan electronic device and a photo-diode as an optical device both formedon an InP substrate, comprising:

a first step of forming a first epitaxial layer of gallium indiumarsenide (GaInAs), a second epitaxial layer of n-type aluminum indiumarsenide (n-AlInAs), a third epitaxial layer of n-type indium phosphide(n-InP), a fourth epitaxial layer of undoped GaInAs and a fifthepitaxial layer of p-type gallium indium arsenide (p-GaInAs) formed onan InP substrate in the stated order;

a second step of removing the fifth and the fourth epitaxial layers,leaving a p-type electrode (p-electrode) region in a photo-diode regionso as to expose the third epitaxial layer;

a third step of forming an anode of said photo-diode on the fifthepitaxial layer and a cathode thereof on the third epitaxial layer inthe photo-diode region, and forming a source electrode and a drainelectrode of the field effect transistor on the third epitaxial layer ina field effect transistor region;

a fourth step of removing the third, the fourth and the fifth epitaxiallayers between the photo-diode and the field effect transistor so as toelectrically separate both regions;

a fifth step of etching the third epitaxial layer between the sourceelectrode and the drain electrode in the field effect transistor regionto expose the second epitaxial layer so as to form a gate electrode onthe exposed second epitaxial layer; and

a sixth step of forming a wiring for electrically connecting the thusformed photo-diode and field effect transistor.

A fourth object of present invention is to provide an opto-electronicintegrated circuit comprising a field effect transistor which is a highelectron mobility transistor (HEMT) having high frequencycharacteristics, or which is a recessed structure type HEMT havingexcellent high frequency characteristics.

A fifth object of present invention is to provide an opto-electronicintegrated circuit comprising a field effect transistor as an electronicdevice and a photo-diode as an optical device both formed on an InPsubstrate, the field effect transistor comprising a high electronmobility transistor, the photo-diode comprising a PIN photo-diode,

the HEMT comprising a GaInAs Layer epitaxially grown on the InPsubstrate in a preset region thereof, a n-AlInAs layer epitaxially grownon the GaInAs layer, a gate electrode formed on the AlInAs layer, and asource electrode and a drain electrode formed on the AlInAs layer withthe gate electrode therebetween,

the PIN photo-diode comprising;

the GaInAs layer epitaxially grown on the InP substrate near the regionof the field effect transistor simultaneously with the growth of that ofthe field effect transistor, the n-AlInAs layer epitaxially grown on theGaInAs layer simultaneously with the growth of that of the field effecttransistor, a n-InP layer epitaxially grown on the n-AlInAs layer, anundoped GaInAs layer epitaxially grown on the n-InP layer in a presetregion thereof, a p-GaInAs layer epitaxially grown on the undoped GaInAslayer, an anode formed on the p-GaInAs layer, and a cathode formed onthe n-InP layer near the undoped GaInAs layer.

The present invention will become more fully understood from thedetailed description given hereinbelow and the accompanying drawingswhich are given by way of illustration only, and thus are not to beconsidered as limiting the present invention.

Further scope of applicability of the present invention will becomeapparent from the detailed description given hereinafter. However, itshould be understood that the detailed description and specificexamples, while indicating preferred embodiments of the invention, aregiven by way of illustration only, since various changes andmodifications within the spirit and scope of the invention will becomeapparent to those skilled in the art from this detailed description.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A,1B,1C,1D,1E,1F,1G,1H,1I,1J,1K,1L and 1M are sectional views ofrespective steps of the process for producing an opto-electronicintegrated circuit according to one embodiment of the invention;

FIG. 2 is a sectional view of the opto-electronic integrated circuitaccording to one embodiment of the invention, having a buffer layer 34;

FIG. 3 is a sectional view of the opto-electronic integrated circuitaccording to further another embodiment of this invention, having aspacer 35; and

FIG. 4 is a sectional view of the opto-electronic integrated circuitaccording to additional further another embodiment of this invention,having the source electrode and drain electrode of a HEMT as anelectronic device formed directly on a n-AlInAs layer 3 respectively.

DESCRIPTION OF THE PREFERRED EMBODIMENT

As shown in FIG. 1A, epitaxial layers 2-6 are formed on an iron (Fe)doped InP substrate 1 one upon another by the OMVPE (Organic MetallicVapor Epitaxy). In this embodiment the substrate temperature is 600° C.,the pressure, 60 Torr, and the feed ratio between an element in Group Vand an element in Group III (V/III ratio), 180.

The layer 2 of GaInAs is formed by a reaction among three kinds of gasof triethylgallium (TEG), trimethylindium (TMI) and arsine (AsH₃). Thegas flow rates of TEG and TMI are adjusted so that the composition ratiobetween the gallium (Ga) and indium (In) of the GaInAs layer 2 is set soas to obtain a lattice conformity with the InP, i.e., Ga:In issubstantially 0.47:0.53, and the reaction time is adjusted so that theGaInAs layer 2 has a thickness of about 0.1 μm(micron).

The layer 3 on n-AlInAs is formed by the reaction among three kinds ofgas of TMI, trimethylaluminium (TMA) and arsine. The gas flow rates ofTMA and TMI are adjusted so that the composition ratio between thealiuminium (Al) and In of the AlInAs layer 3 is set so as to obtain alattice conformity with the InP, i.e., Al:In is substantially 0.48:0.52,and the reaction time is adjusted so that the AlInAs layer 2 has athickness of about 300Å. In forming the layer 3, the partial pressure ofthe arsine is more increased in the undoped case. When the partialpressure of the arsine is increased, the Al relatively lacks, and thecarbon atoms (C) generated in the reaction substitute aluminium atoms.The carbon atoms function as donors, and resultantly the layer becomesn-type.

The layer 4 on n-InP is formed by the reaction between TMI and phosphine(PH₃). The reaction time is adjusted so that the layer has a thicknessof 2000Å.

The layer 5 of undoped GaInAs is formed in the same way as the GaInAslayer 2. The reaction time, however, is adjusted so that the layer 5 hasa thickness of about 1 to 2 μm.

The layer 6 of p-GaInAs is formed basically in the same way as theGaInAs layer 2. The partial pressure of the arsine, however, is loweredthat when the GaInAs layer 2 is formed. When the partial pressure of thearsine is lowered, Ga and In atoms in Group III relatively lack. The Catoms generated in the reaction substitute Ga and In atoms, and the Catoms act as acceptors. Resultantly the layer becomes p-type.

Next, a silicone nitride (SiN) film 20 having a thickness of about 1000Åis formed on the p-GaInAs layer 6 by the electron cyclotron resonanceplasma chemical vapor deposition (ECR Plasma CVD). Further a resist filmis applied onto the SiN film 20, and then a resist pattern is left onlyin a photo-diode (PD) region 12 in which a PIN photo-diode (PIN PD) willbe formed (FIG. 1B).

Subsequently, the SiN film 20 is removed by hydrofluoric acid (FH) usingthe resist pattern 21 as a mask, to form a mask pattern 22 of the SiNfilm.

Next, the p-GaInAs layer 6 and the undoped GaInAs layer 5 aresequentially etched by a liquid mixture of phosphoric acid, hydrogenperoxide and water using the mask pattern 22 of the SiN film and theresist pattern 21. The etching liquid containing phosphoric acid as themain component selectively etches GaInAs and InP, i.e., etches theformer but does not etch the latter. The etching automatically stopswhen the n-InP layer 4 is exposed (FIG. 1C).

Next, a resist 23 is formed on the p-GaInAs layer 6 left as thep-electrode layer of a PD. The resist 23 has a negative pattern of thep-electrode which will be formed on the p-GaInAs layer 6. Then, on thesurface is vaporized a p-ohmic metal film 24 of gold zinc (AuZn) orothers (FIG. 1D).

The p-ohmic metal film 24 is lifted off using the resist 23 to form ap-ohmic electrode 10. Then a resist 25 is formed on the surface. Theresist 25 has negative patterns of a n-electrode of the PD and of ohmicelectrodes of a HEMT which will be formed in a FET region 13. Further,on the surface is formed a n-ohmic metal film 26 of gold germanium(AuGe) or others (FIG. 1E).

Then the n-ohmic metal film 26 is lifted off using the resist 25 to formn-ohmic electrodes 7,8,9. After the electrodes 7,8,9 are formed, theyare subjected to 1 minute alloying treatment at 350° C. The p-ohmicelectrode 10 provides the anode of the PD to be formed in a PD region12, and the n-ohmic electrode 7 provides the cathode. The n-ohmicelectrodes 8, 9 provide a source electrode and a drain electrode of theHEMT to be formed in the FET region 13 (FIG. 1F).

Next, etching is conducted to electrically separate the PD region 12 andthe FET region 13. First, a silicone nitride (SiN) film 27 of athickness of about 1000Å is formed on the entire surface by ECR plasmaCVD. Then, on the film 27 is formed a resist film 28 having a negativepattern of a separation region. The SiN film 27 is removed byhydrofluoric acid (FH) using the resist film 28 as a mask (FIG. 1G).

Subsequently, the n-InP layer 4 is etched by an aqueous solution ofhydrochloric acid as an etching liquid, using the resist film 28 and theSiN film 27 as masks. The aqueous solution of hydrochloric acid etchesInP but does not etch AlInAs. Then, the n-AlInAs layer 3 and the GaInAslayer 2 are etched by a mixture liquid of phosphoric acid and hydrogenperoxide and water. Since this etching liquid does not etch InP, theetching automatically stops when the InP substrate 1 is exposed (FIG.1H).

Subsequently, the n-AlInAs layer 3 is exposed in a region of a gateelectrode of the HEMT to be formed in the FET region 13. To this end, onthe entire surface is formed a SiN film 29 of a thickness of about 1000Åby the ECR plasma CVD. Then, on the SiN film 29 is formed a resist film30 having a negative pattern of the gate electrode region. Then, the SiNfilm 29 is removed by FH using the resist film 30 as a mask (FIG. 1I).Next, the n-InP film 4 is etched by an aqueous solution of hydrochloricacid as an etching liquid using the resist film 30 and the SiN film 29as masks. As described above, since this etching liquid does not etchAlInAs, the etching automatically stops when the n-AlInAs layer 3 isexposed. Then, the resist film 30 and the SiN film 29 are removed (FIG.1J).

Subsequently, on the surface is formed a resist film 31 having anegative pattern of the gate electrode to be formed in the FET region 13on the exposed n-AlInAs layer 3. Then, on the surface is vaporized agate metal film 32 of, e.g., titanium/platinum/gold (Ti/Pt/Au) FIG. 1K).Next, the gate metal film 32 is lifted off using the resist film 31 toform the gate electrode 11 (FIG. 1L).

Following the above described steps, the PIN photo-diode and the HEMT ofthe recessed structure are formed respectively in the PD region 12 andFET region 13.

Finally, a resist film having a negative pattern of a wiring is formed,a wiring metal film is vaporized thereon. Then, the wiring metal film islifted, and a wiring 33 is formed (FIG. 1M).

As described above, since the p-electrode layer 6 is p-doped in theepitaxial growth, the diffusion or the ion implantation steps forforming the p-electrode are not necessary. The n-InP layer 4 is usedcommonly when the HEMT and the PD are formed.

The HEMT of the recessed structure has an advantage that the sourceresistance can be easily decreased, and excellent high frequencycharacteristics, such as a shut off frequency f_(T) of above 20 gigahertz (GHz).

According to this embodiment, a light receiving opto-electronicintegrated circuit which is well responsive to an optical signal of 1giga bit per second (Gbps) at a light receiving diameter of the PD of 50μm, and a gate length of 1 μm can be well reproduced.

In the embodiment, the p-GaInAs layer 6 is used as the p-electrode layerof the PD, but in place thereof, a p-InP layer may be used. In thiscase, in the step of FIG. 1A, p-InP layer is epitaxially grown in placeof the p-GaInAs layer 6. But in the step of FIG. 1C, the etching liquidfor the epitaxial layer 6 has to be changed to an aqueous solution ofhydrochloric acid, or others.

In the embodiment, the n-InP layer 4 is formed in the recessed structureon the n-AlInAs layer 3 so that the contact resistances of the sourceand the drain electrodes of the HEMT are decreased. But the n-InP layermay be replaced with a n-GaInAs layer. In this case, in the step offorming the epitaxial layers of FIG. 1A, a n-GaInAs layer has to beformed instead of the n-InP layer 4. Further in the step of FIG. 1C, itis necessary that the period of time of etching the undoped GaInAs layer5 is so controlled that the n-GaInAs layer is not removed. Besides,since the mixture liquid of phosphoric acid, hydrogen peroxide and waterexemplifying above the etching liquid of GaInAs adversely etches AlInAs,it is necessary that in the step of FIG. 1J the period of time ofetching the n-GaInAs layer 4 is also so controlled that the n-AlInAslayer 3 is not removed. With the n-GaInAs layer used as the epitaxiallayer 4, the contact resistances of the source and the drain electrodesare further decreased than with the n-InP layer used as the epitaxiallayer 4.

FIG. 2 shows another embodiment. In this variation, there is provided abuffer layer 34 of InP or AlInAs having a thickness of about 2000Åbetween the InP substrate 1 and the GaInAs layer 2. This buffer layer 34can be formed together with the other epitaxial layers in the step offorming the epitaxial layers of FIG. 1A. The buffer layer 34 prohibitsthe intrusion of the impurities in the InP substrate into the GaInAslayer.

FIG. 3 shows further another embodiment. In this embodiment, there isinterposed an undoped AlInAs layer 35 as a spacer between the GaInAslayer 2 and the n-AlInAs layer 3. This spacer 35 can be formed togetherwith the epitaxial layers in the step of FIG. 1A. The spacer 35 keepsthe n-AlInAs layer 3 away from the two-dimensional electron gas of theHEMT so as to place the layer 3 out of the influence of the ionizingimpurities of the n-AlInAs layer 3. The carrier mobility is preventedfrom lowering.

FIG. 4 shows additional further another embodiment in which theepitaxial layer 4 of n-InP or n-GaInAs is removed from the HEMT of theabove described embodiments. The opto-electronic integrated circuitaccording to this embodiment can be formed by adding a step of etchingthe epitaxial layer 4 subsequent to the etching step of FIG. 1C. Theopto-electronic integrated circuit according to the embodiment as wellmay include the buffer layer 34 between the InP substrate 1 and theGaInAs layer 2 and/or the spacer 35 between the GaInAs layer 2 and then-AlInAs layer 3. The same effects as in the embodiments of FIGS. 2 and3 are produced.

From the invention thus described, it will be obvious that the inventionmay be varied in many ways. Such variations are not to be regarded as adeparture from the spirit and scope of the invention, and all suchmodifications as would be obvious to one skilled in the art are intendedto be included within the scope of the following claims.

I claim:
 1. An opto-electronic integrated circuit comprising a field effect transistor as an electronic device and a photo-diode as an optical device both formed on an InP substrate,the field effect transistor comprising a high electron mobility transistor the photo-diode comprising a PIN photo-diode, the high electron mobility transistor comprising; a GaInAs layer epitaxially grown on the InP substrate in a preset region thereof, a n-AlInAs layer epitaxially grown on the GaInAs layer, a gate electrode formed on the AlInAs layer, and a source electrode and a drain electrode formed on the AlInAs layer with the gate electrode therebetween, and the PIN photo-diode comprising; the GaInAs layer epitaxially grown on the InP substrate near the region of the field effect transistor simultaneously with the growth of that of the field effect transistor, the n-AlInAs layer epitaxially grown on the GaInAs layer simultaneously with the growth of that of the field effect transistor, a n-InP layer epitaxially grown on the n-AlInAs layer, an undoped GaInAs layer epitaxially grown on the n-InP layer in a preset region thereof, a p-GaInAs layer epitaxially grown on the undoped GaInAs layer, an anode electrode formed on the p-GaInAs layer, and a cathode electrode formed on the n-InP layer near the undoped GaInAs layer.
 2. An opto-electronic integrated circuit according to claim 1, wherein the photo-diode has a p-InP layer in place of the p-GaInAs layer.
 3. An opto-electronic integrated circuit comprising a field effect transistor as an electronic device and a photo-diode as an optical device both formed on an inP substrate,the field effect transistor comprising a high electron mobility transistor, the photo-diode comprising a PIN photo-diode, the high electron mobility transistor comprising: a GaInAs layer epitaxially grown on an InP substrate in a preset region thereof; a n-AlInAs layer located above the GaInAs layer and epitaxially grown; a gate electrode formed on the n-AlInAs layer; an InP layer formed on the n-AlInAs layer; and a source electrode and a drain electrode formed on the InP layer with the gate electrode therebetween, and the PIN photo-diode comprising; the GaInAs layer epitaxially grown near the region of the field effect transistor simultaneously with the growth of that of the field effect transistor, the n-AlInAs layer epitaxially grown on the GaInAs layer simultaneously with the growth of that of the field effect transistor, an n-InP layer epitaxially grown on the n-AlInAs layer, an undoped GaInAs layer epitaxially grown on the n-InP layer, and a p-GaInAs layer epitaxially grown on the undoped GaInAs layer, an anode electrode formed on the p-GaInAs layer, and a cathode electrode formed on the n-InP layer under the undoped GaInAs layer.
 4. An opto-electronic integrated circuit according to claim 3, wherein the photo-diode has a p-InP layer in place of the p-GaInAs layer.
 5. An opto-electronic integrated circuit according to claim 4, wherein the photodiode and the field effect transistor have respective n-GaInAs layers in place of the respective n-InP layers.
 6. An opto-electronic integrated circuit according to claim 3, wherein the photodiode and the field effect transistor have respective n-GaInAs layers in place of the respective n-InP layers. 